Particulate Contamination of a LPCVD Production Reactor

Problem encountered
Substrates contaminated by solid particles, leading to a decline in productivity.

Objective
To increase productivity.

Solutions

To specify the reasons for substrate contamination. The complex nature of the furnace and the influence of gravity (natural convection, particle weight) call for a 3D simulation.
To optimize pumping and filling conditions.

This type of study has been applied to the following processes: "nitride", "poly", "TeOs"

This study has been carried out in association with ADIXEN.

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