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Fluids chemistry - Reactive flows

Study of a LPCVD Production Reactor

Problem encountered
Solid deposits outside substrates is leading to maintenance costs and a productivity decline (contamination by solid particles).
  • To increase productivity,
  • To reduce maintenance costs.
  • To set goals with our customer, supplier of pumping solutions.
  • To identify the type of studies and their precision according to the objectives,
  • Studies carried out using the most suited physical and geometrical models.

Studies carried out

  • 3D simulation of the whole equipment in different phases : pumping, deposit, filling,
  •  Deposition  as contamination source, then study of the pump-down and pressure rise dynamics in the furnace  (see contamination)
  • The reactivity is represented, thanks to a bibliographic review, by a simplified kinetic model adapted to the conditions of the simulated furnace.
  • The whole approach is validated in comparison with client's observations.
  • The results allow a validation of the concepts proposed by our client, then an optimization.
Deposition velocity on substrates and inner walls ( intermediate modelling non-predictive). Red area: potential for fast contamination by deposits.
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